本文主要研究内容
作者张锦龙,程鑫彬,王占山（2019）在《Influence of Small-Size Contaminations on Thin Film Structural Properties》一文中研究指出：An approach for studying the influence of nano-particles on the structural properties of deposited thin films is proposed. It is based on the molecular dynamic modeling of the deposition process in the presence of contaminating nano-particles. The nano-particle is assumed to be immobile and its interaction with film atoms is described by a spherically symmetric potential. The approach is applied to the investigation of properties of silicon dioxide films. Visualization tools are used to investigate the porosity associated with nano-particles. The structure of the film near the nano-particle is studied using the radial distribution function. It is found that fluctuations of film density near the nano-particles are essentially different in the cases of low-energy and high-energy deposition processes.
Abstract
An approach for studying the influence of nano-particles on the structural properties of deposited thin films is proposed. It is based on the molecular dynamic modeling of the deposition process in the presence of contaminating nano-particles. The nano-particle is assumed to be immobile and its interaction with film atoms is described by a spherically symmetric potential. The approach is applied to the investigation of properties of silicon dioxide films. Visualization tools are used to investigate the porosity associated with nano-particles. The structure of the film near the nano-particle is studied using the radial distribution function. It is found that fluctuations of film density near the nano-particles are essentially different in the cases of low-energy and high-energy deposition processes.
论文参考文献
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论文详细介绍
论文作者分别是来自Chinese Physics Letters的张锦龙,程鑫彬,王占山，发表于刊物Chinese Physics Letters2019年03期论文，是一篇关于,Chinese Physics Letters2019年03期论文的文章。本文可供学术参考使用，各位学者可以免费参考阅读下载，文章观点不代表本站观点，资料来自Chinese Physics Letters2019年03期论文网站，若本站收录的文献无意侵犯了您的著作版权，请联系我们删除。
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张锦龙：Influence of Small-Size Contaminations on Thin Film Structural Properties论文
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